Transparent oxide semiconductors based on TiO2 doped with V,Co and Pd elements

In this work, investigations of electrical and optical properties of as-deposited thin films of TiO₂ doped with Pd, Co and V elements prepared by the low-pressure hot-target reactive magnetron sputtering have been outlined. Results allowed to find out how selected properties of TiO₂ had changed from oxide non-conductor to oxide-semiconductor with desired p- or n-type electrical conduction due to the incorporation of the metal components, mentioned above.