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Effect of nonstoichiometry on Raman scattering of VO2 films
作者姓名:袁宏韬  冯克成  王学进  李超  何琛娟  聂玉昕
作者单位:Changchun University of Science and Technology, Changchun 130022, China; Institute of Physics ,Chinese Academy of Sciences, Beijing 100080, China;Changchun University of Science and Technology, Changchun 130022, China;Institute of Physics ,Chinese Academy of Sciences, Beijing 100080, China;Changchun University of Science and Technology, Changchun 130022, China;Institute of Physics ,Chinese Academy of Sciences, Beijing 100080, China;Institute of Physics ,Chinese Academy of Sciences, Beijing 100080, China
基金项目:Project supported by the National Natural Science Foundation of China (Grant No 50072045), and the Foundation of Center for Condensed Matter Physics.
摘    要:We report on Raman scattering of VO2 films prepared by radio frequency magnetron sputtering under different conditions. Our investigations revealed that the dominated Raman peaks shift towards high frequency for both V-rich and O-rich VO2 films, compared with the stoichiometry VO2 films. The experimental evidence is presented and the cause for nonstoichiometry dependence of Raman spectra of VO2 films is discussed.

关 键 词:拉曼光谱  二氧化钒薄膜  拉曼散射  RF磁控溅射  非化学计量  薄膜光谱
收稿时间:6/4/2003 12:00:00 AM

Effect of nonstoichiometry on Raman scattering of VO2 films
Yuan Hong-Tao,Feng Ke-Cheng,Wang Xue-Jin,Li Chao,He Chen-Juan and Nie Yu-Xin.Effect of nonstoichiometry on Raman scattering of VO2 films[J].Chinese Physics B,2004,13(1):82-84.
Authors:Yuan Hong-Tao  Feng Ke-Cheng  Wang Xue-Jin  Li Chao  He Chen-Juan and Nie Yu-Xin
Institution:Changchun University of Science and Technology, Changchun 130022, China; Changchun University of Science and Technology, Changchun 130022, China; Institute of Physics ,Chinese Academy of Sciences, Beijing 100080, China; Institute of Physics ,Chinese Academy of Sciences, Beijing 100080, China
Abstract:We report on Raman scattering of VO_2 films prepared by radio frequency magnetron sputtering under different conditions. Our investigations revealed that the dominated Raman peaks shift towards high frequency for both V-rich and O-rich VO_2 films, compared with the stoichiometry VO_2 films. The experimental evidence is presented and the cause for nonstoichiometry dependence of Raman spectra of VO_2 films is discussed.
Keywords:vanadium dioxide thin films  Raman spectra  nonstoichiometry  RF magnetron sputtering
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