Phase composition diagnostics of surfaces,thin films,and interfaces by Auger electron spectroscopy |
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| Authors: | V. G. Beshenkov A. F. Vyatkin A. G. Znamenskii V. A. Marchenko |
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| Affiliation: | (1) Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Science, Chernogolovka, Moscow oblast, 142432, Russia |
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| Abstract: | The methods of phase composition diagnostics of materials by Auger spectra, developed in IMT RAS over a number of years, are presented. Examples of their use are generally in the determination of phase depth profiles. However, the considered methods can be also used for the composition diagnostics of small size objects (nanostructures) under conditions of significant noisiness of the Auger spectra and when the studied objects probably leave an analyzed region. |
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