铈掺杂氧化铝薄膜的蓝紫色发光特性

应用中频反应磁控溅射技术制备了Al₂O₃:Ce³⁺的非晶薄膜.X射线光电子谱(XPS)检测显示薄膜中有Ce³⁺生成.这些薄膜的光致发光峰是在374nm附近，它来自于Ce³⁺离子的5d¹激发态向基态4f¹的两个劈裂能级的跃迁.发光强度强烈地依赖于薄膜的掺杂浓度，但发光峰位置不随掺杂浓度而变化.Ce³⁺含量和薄膜的化学成分是通过X射线散关键词：光致发光2O₃')" href="#">Al₂O₃薄膜稀土元素

The blue luminescence of cerium doped aluminum oxide thin film

Amorphous aluminum oxide thin films doped with cerium have been deposited by middle frequency reactive magnetron sputtering. There exist Ce³⁺ ions in the Al₂O₃:Ce thin films as shown by XPS measurement. The photoluminescence emission from these films show peaks around 374 nm which are associated with 5d to 4f transitions of Ce³⁺ ions. The intensity of these peaks is strongly dependent on the amount of cerium incorporated in the films. The presence of cerium as well as the stoichiometry of these films have been determined by energy dispersive X-ray spectroscopy (EDS) measurements. It is proposed that the light emission observed is generated by luminescence centers associated with trivalent ionic cerium impurities. The crystalline structure of the sample was analysed by X-ray diffraction (XRD). Auger electron spectroscopy has been used to estimate the stoichiometry of the films. This luminescence feature is advantageous for display techniques which require a purer blue emission.