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Effect of methane on magnetron sputtering graphite target deposited films and tribological properties of a-C:H:Ti/a-C:H friction pairs |
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| Authors: | Xinyu Wen Zhenguo Lai Bin Zhang Xin Wang Yuan Yuan Wang Kaixiong Gao Caihong Tao |
| Institution: | 1. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou, China
School of Chemistry and Chemical Engineering, Lanzhou Jiaotong University, Lanzhou, China;2. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou, China Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, China;3. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou, China;4. AECC Beijing Institute of Aeronautical Materials, Beijing, China;5. College of Petrochemical Technology, Lanzhou University of Technology, Lanzhou, China;6. School of Chemistry and Chemical Engineering, Lanzhou Jiaotong University, Lanzhou, China |
| Abstract: | In this study, we prepared a-C:H films with different nanostructures at different methane flow rates. The effect of the methane flow rate on the tribological properties of 440 steel/a-C:H friction pairs and a-C:H:Ti/a-C:H friction pairs in an atmospheric environment was studied by a reciprocating friction machine. The results show that there is no relationship between the tribological properties of 440 steel/a-C:H friction pair and methane flow rate. The tribological performance of the a-C:H:Ti/a-C:H friction pair was greatly improved. In particular, in the friction pair of a-C:H:Ti/a-C:H with a methane flow rate of 20 sccm, superlubricity is shown, and the wear rate is only 4.04 × 10−9 mm3/Nm. After tribological experiments, Raman spectroscopy, XPS, and other characterization methods were used to study the relationship between the nanostructure and tribological properties of a-C:H:Ti films and a-C:H prepared with different methane flow rates. This study is great significance to the application of a-C:H:Ti/a-C:H friction pair in mechanical parts under atmospheric environment. |
| Keywords: | DLC/DLC pair friction friction hydrogenated amorphous carbon films hydrogenated carbon ball |