Reminiscences with Martin P. Seah

Starting in the mid-1960s, the detection and display of peaks in Auger electron spectroscopy (AES) were improved by using modulation of the electron energy analyzer coupled with electron detection using a lock-in amplifier. This allowed a derivative of the electron energy distribution, N(E), to be obtained directly at the output of the lock-in amplifier thereby removing most of the effect from the relatively large, slowly varying, electron background signal due to secondary and backscattered electrons. For relatively low modulation amplitudes, the peak-to-peak intensity of the Auger features increased linearly with modulation amplitude (for a deflection-type analyzer), improving the signal-to-noise ratio. However, with relatively large modulations, the Auger peak shapes distorted, and the peak-to-peak heights eventually decreased in size, and this nonlinearity would cause problems in quantitative analysis. A universal curve was developed for singlet Auger peaks to approximate corrections due to this peak distortion, but an approach to exactly correct for such distortions was largely ignored by the AES community. This approach was called Dynamic Background Subtraction and is even relevant today as some Auger instruments using modulation and lock-in amplifiers are still being manufactured. This review paper describes approximate and exact corrections for modulation effects in AES data.