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Effects of gas composition on the growth of multi-walled carbon nanotube |
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| Authors: | Te-Hua Fang Deng-Maw Lu |
| Affiliation: | a Institute of Mechanical and Electromechanical Engineering, National Formosa University, Yunlin 632, Taiwan b Department of Mechanical Engineering, Kun Shan University, Tainan 710, Taiwan c Department of Mechanical Engineering, Southern Taiwan University of Technology, Tainan 710, Taiwan |
| Abstract: | This paper studies the effects of different gas compositions on the growth of multi-walled carbon nanotube (MWCNT) films by using an electron cyclotron resonance chemical vapor deposition (ECR-CVD) method. The Raman spectrum was employed to explore the composition of the MWCNT films grown under different mixtures of C3H8 and H2. The results showed that the optimum relative intensity ratio of the D band to G band (i.e., ID/IG) is 2 for the cases considered in this study. In addition, the morphology and microstructure of the MWCNTs were examined by field emission scanning electron microscopy (FE-SEM) and field emission gun transmission electron microscopy (FEG-TEM). Furthermore, atomic force microscopy (AFM) and scanning thermal microscopy (SThM) were used to study the surface topography and thermal properties of the MWCNTs. |
| Keywords: | Carbon nanotubes Gas composition Material properties ECR-CVD |
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