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Microstructural and compositional studies of liquid-phase deposition derived PbTiO3 thin films on LaNiO3 substrates |
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| Authors: | Ming-Chi Hsu Yu-Ming Sun Min-Hsiung Hon |
| Institution: | a Department of Materials Science and Engineering, National Cheng Kung University, 1 Ta-Hsueh Road, Tainan, 701 Taiwan, ROC b Department of Materials Science and Engineering, National United University, Miao-Li, 360 Taiwan, ROC c Frontier Material and Micro/Nano Science and Technology Centre, Taiwan, ROC |
| Abstract: | PbTiO3 thin films were successfully deposited on the LaNiO3 (LNO) substrates by the liquid-phase deposition (LPD) method and post-annealing at various temperatures. The structure, morphology and composition of the films were investigated by some analytical techniques. The as-deposited films are amorphous and composed of densely packed spherical particles. The films with the grain size of 180 nm start to decompose and crystallize into perovskite structure at 450 °C and show a perovskite single phase with tetragonal structure after annealing at 650 °C. X-ray photoelectron spectroscopy (XPS) analysis reveals that the as-deposited film contains fluorine and carbon as major impurities. Fluorine could be completely eliminated by annealing at 650 °C in air. |
| Keywords: | Perovskite Liquid-phase deposition Microstructure |
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