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Experimental and numerical analysis of crack-free DPSS laser dicing of borosilicate glass |
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| Authors: | Guillaume Savriama Nadjib Semmar Laurent Barreau Chantal Boulmer-Leborgne |
| Institution: | 1. GREMI-UMR 7344, CNRS/Université d’Orléans, 14 rue d’Issoudun, BP 6744, 45067, Orléans Cedex 2, France 2. STMicroelectronics, 16 rue Pierre et Marie Curie, BP 7155, 37071, Tours Cedex 2, France |
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