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Simple fabrication of closed-packed IR microlens arrays on silicon by femtosecond laser wet etching |
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| Authors: | Xiangwei Meng Feng Chen Qing Yang Hao Bian Guangqing Du Xun Hou |
| Institution: | 1. State Key Laboratory for Manufacturing System Engineering and Key Laboratory of Photonics Technology for Information of Shaanxi Province, School of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an, 710049, People’s Republic of China |
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