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Ag y :TiN x thin films for dry biopotential electrodes: the effect of composition and structural changes on the electrical and mechanical behaviours |
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| Authors: | P. Pedrosa D. Machado J. Borges M. S. Rodrigues E. Alves N. P. Barradas N. Martin M. Evaristo A. Cavaleiro C. Fonseca F. Vaz |
| Affiliation: | 1. SEG-CEMUC–Department of Mechanical Engineering, University of Coimbra, Coimbra, Portugal 2. Universidade do Porto, Faculdade de Engenharia, Departamento de Engenharia Metalúrgica e de Materiais, Rua Dr. Roberto Frias, s/n, 4200-465, Porto, Portugal 3. Centro de Física, Universidade do Minho, 4710-057, Braga, Portugal 4. Department of Control Engineering, Faculty of Electrical Engineering, Czech Technical University in Prague, Technická 2, Prague 6, Czech Republic 5. Instituto de Plasmas e Fus?o Nuclear, Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, 1049-001, Lisbon, Portugal 6. Centro de Ciências e Tecnologias Nucleares, Instituto Superior Técnico, Universidade de Lisboa, E.N. 10 (km 139,7), 2695-066, Bobadela LRS, Portugal 7. Institut FEMTO-ST, UMR 6174, CNRS, ENSMM, UTBM, Université de Franche-Comté, 15B, Avenue des Montboucons, 25030, Besan?on Cedex, France |
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