基于PSD的微摆镜角度自准直测试系统设计

基于压电陶瓷的微摆镜是一种典型的二维角驱动部件,微摆镜系统的实用化需要进行微角度的测量,以便得到驱动电压与微偏转角之间的对应关系。设计了一种基于位置敏感探测器(PSD)的微摆镜角度测试系统,应用激光自准直原理,采用两次45°折返式结构,缩小了系统的体积并解决了传统折返式系统难以精准搭建的问题;采用多层前馈神经网络法对PSD进行了非线性校正,修正后整个系统的测量精度可达0.5″,测量范围为±400″。符合微摆镜角度测量的要求。

Design of an autocllimator swing micro-mirror angle measurement system based on PSD

The swing micro-mirror based on piezoelectric ceramics is a typical two-dimensional angle-driving compo-nent .In order to get the relationship between the control voltage and the deflection angle ,the angle of the swing micro-mirror has to be measured .An autocllimator swing micro-mirror angle measurement system based on PSD is designed . The system is applied the theory of autocollimate .The twice 45° foldback system is adopted in order to reduce the volume of the system and solve the accurate build problem of traditional foldback system ;Multilayer feedforward neural network is used to correct 2-D PSD nonlinear error .The measurement range is ± 400″and the accuracy is 0 .5″of the system after corrected .That can meet the application requirements of swing micro-mirror .