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Zinc oxide nanostructured layers for gas sensing applications
Authors:A P Caricato  A Cretí  A Luches  M Lomascolo  M Martino  R Rella  D Valerini
Institution:1. Dipartimento di Fisica, Università del Salento, 73100, Lecce, Italy
2. Istituto per la Microelettronica ed i Microsistemi, IMM-CNR, Lecce, Italy
3. ENEA, C.R. Brindisi, 72100, Brindisi, Italy
Abstract:Various kinds of zinc oxide (ZnO) nanostructures, such as columns, pencils, hexagonal pyramids, hexagonal hierarchical structures, as well as smooth and rough films, were grown by pulsed laser deposition using KrF and ArF excimer lasers, without use of any catalyst. ZnO films were deposited at substrate temperatures from 500 to 700°C and oxygen background pressures of 1, 5, 50, and 100 Pa. Quite different morphologies of the deposited films were observed using scanning electron microscopy when different laser wavelengths (248 or 193 nm) were used to ablate the bulk ZnO target. Photoluminescence studies were performed at different temperatures (down to 7 K). The gas sensing properties of the different nanostructures were tested against low concentrations of NO2. The variation in the photoluminescence emission of the films when exposed to NO2 was used as transduction mechanism to reveal the presence of the gas. The nanostructured films with higher surface-to-volume ratio and higher total surface available for gas adsorption presented higher responses, detecting NO2 concentrations down to 3 ppm at room temperature.
Keywords:
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