硅微陀螺梳齿驱动的面内失准分析

静电梳齿微驱动器因其结构简单、功耗低、灵敏度高、受温度影响小，成为硅微陀螺仪的主要驱动方式。静电梳齿微驱动器通常由活动梳齿和固定梳齿组成。理想情况下，活动梳齿平行地位于两固定梳齿中心位置。但由于加工误差、驱动结构不对称、扰动等因素，使得活动梳齿相对固定梳齿发生偏转。该文应用能量法及虚功原理，建立了梳齿之间的力与力矩平衡方程。得出了非理想情况下，偏离距离和转角的解析表达式，并分析得出了梳齿间的临界电压。经过数值仿真发现，梳齿面内既偏转又转动时的临界电压小于只发生偏转或转动时的临界电压。

Analysis of electrostatic comb-finger actuator in-plane misalignments

Silicon micromachined gyroscope is mainly driven by electrostatic comb-finger actuator which has advantages of simple structure, low power supply, high sensitivity and not susceptible to temperature. It is usually composed of fixed and movable comb fingers. Ideally, the movable comb-finger is parallelly situated at the center of two stators. However, due to fabrication error, asymmetric drive structure, small disturbance and so on, the movable comb fingers move laterally and rotationally from the fixed ones. Applying energy method and virtual work principle, this paper develops force and moment equations between the fixed and movable comb finger. The critical voltage between comb fingers is given in non-ideal conditions. Numerical simulation reveals that the critical voltage of both translation and rotation is less than that of one-dimensional model considering only translation or rotation.