Fast imaging method combining cantilever and feedback signals in contact-mode atomic force microscopy

A fast imaging method in a contact-mode atomic force microscope (AFM) is examined for its principle and performance, where the image is acquired by combining a cantilever signal and a feedback signal applied to a piezotube. The frequency component of the feedback signal is restricted in the lower frequency region to keep the linear relationship between the feedback signal and the displacement of the piezotube. It is shown that the image is basically independent of the feedback details since a wide detection bandwidth is certified by the cantilever response much faster than by the feedback response, allowing a fast scanning. The fast scanning, however, enhances the distortion in the transient region where surface height changes abruptly. This influence can be reduced by choosing the scan line direction for the data acquisition. The combination procedure also reduces the low-frequency noise in the feedback signal. A 512×512-pixel image was obtained in 90 s without sacrificing the resolution. Received: 24 November 1998 / Accepted: 31 March 1999 / Published online: 2 June 1999