Electrical and mechanical properties of thin metal films: Size effects

A general expression for the function of electron scattering in thin films of a grain structure is derived which takes account of both the external and internal size effects. Limiting and particular values of this function are given for polycrystalline and single-crystal films. Theoretical results are compared to the experimental results obtained for aluminium and tin. The relationship between size effects and resistivity, temperature coefficient of resistance, longitudinal and transverse strain coefficient of resistance and thermoelectric power is studied. The dependence of the orientation of monocrystalline copper and aluminium films on thermal stress, the direction of the energy density of elastic strains and the anistropy of elastoresistance coefficients in these films are examined. An expression for the gauge factor in single-crystal metal films of given orientations is derived.