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Influence of nonstationary atomic mixing on depth resolution in sputter depth profiling |
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| Authors: | J. Y. Wang Y. Liu S. Hofmann J. Kovac |
| Affiliation: | 1. Department of Physics, Shantou University, , Shantou, 515063 Guangdong, China;2. Max Planck Institute for Metals Research, , D‐70569 Stuttgart, Germany;3. Department of Surface Engineering and Optoelectronics F4, Jozef Stefan Institute, , 1000 Ljubljana, Slovenia |
| Abstract: | |
| Keywords: | MRI model sputter depth profiling atomic mixing length depth resolution shallow depth profiles |