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Application of differential algebraic method to the aberration analysis of curvilinear-axis electron optical systems |
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| Authors: | L.-P. Wang T.-T. Tang B.-J. Cheng J.R.A. Cleaver |
| Affiliation: | aMicroelectronics Research Centre, Cavendish Laboratory, Madingley Road, Cambridge CB3 0HE, UK;bSchool of Electronic & Information Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China |
| Abstract: | |
| Keywords: | Differential algebra automatic differentiation electron optics |
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