A CO_2 laser rapid-thermal-annealing SiO_x based metal-oxide-semiconductor light emitting diode |
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作者姓名: | 林俊荣 林恭如 |
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作者单位: | Graduate Institute of Photonics and Optoelectronics Department of Electrical Engineering,National Talwan University,Graduate Institute of Photonics and Optoelectronics,Department of Electrical Engineering,National Taiwan University,Talpei 106,Talpei 106 |
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摘 要: | ![]() Enhanced near-infrared (NIR) electroluminescence (EL) of a metal-oxide-semiconductor light emitting device (MOSLED) made on CO_2 laser-annealed SiO_x film is demonstrated.An EL power of near 50 nW from CO_2 laser rapid-thermal-annealing (RTA) MOSLED under a biased voltage of 85 V and a current density of 2.3 mA/cm~2 is preliminarily reported.
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