| 非低温法的稀有气体纯化技术概述 |
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| 引用本文： | 关堂新,吴亮,许令顺.非低温法的稀有气体纯化技术概述[J].低温与超导,2013,41(5). |
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| 作者姓名： | 关堂新 吴亮 许令顺 |
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| 作者单位： | 1. 中国人民解放军海军驻合肥地区军事代表室,合肥,230088
2. 中国电子科技集团公司第十六研究所,合肥,230043 |
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| 摘 要： | 稀有气体广泛应用于工业生产中,如离子刻蚀、检漏等。但是它们在地球上的含量比较少,属于稀有资源,因此需要对它们进行纯化以循环再利用。首先介绍了不同气体纯化的原理,然后以实际生产中的不同稀有气体使用范围为例,说明纯化装置的设计方法和需要考虑的问题。为以后气体纯化装置的设计提供借鉴。
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| 关 键 词： | 纯化 氦气 膜分离法 变压吸附法(PSA) 变温吸附法(TSA) |
An overview on purification technology of rare gas |
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| Guan Tangxin
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Wu Liang
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Xu Lingshun.An overview on purification technology of rare gas[J].Cryogenics and Superconductivity,2013,41(5). |
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| Authors: | Guan Tangxin Wu Liang Xu Lingshun |
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| Abstract: | The rare gas is widely used in industrial manufacture,such as ion etching,leak detection and so on.However,the amount of the rare gas on the earth is little,it is necessary to purify it to reuse.In this article,we firstly introduced the principle of the gas purification.Then we explained the methods and considered items during designing the gas purification instruments by illustrating different gas used fields in actual production.This could supply the reference for the future design of gas purification equipment. |
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| Keywords: | Purification Helium Membrane separation Pressure swing adsorption Thermal swing adsorption |
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