Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing |
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Authors: | Liao Yang Ju Yongfeng Zhang Long He Fei Zhang Qiang Shen Yinglong Chen Danping Cheng Ya Xu Zhizhan Sugioka Koji Midorikawa Katsumi |
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Institution: | State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China. |
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Abstract: | We demonstrate, for the first time to the best of our knowledge, fabrication of three-dimensional microfluidic channels with arbitrary lengths and configurations inside glass by femtosecond laser direct writing. The main fabrication process includes two steps: (1) direct formation of hollow microchannels in a porous glass substrate immersed in water by femtosecond laser ablation and (2) postannealing of the glass substrate at ~1150°C by which the porous glass can be consolidated. We show that a square-wavelike channel with a total length of ~1.4 cm and a diameter of ~64 μm can be easily produced ~250 μm beneath the glass surface. |
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