Effect of substrate annealing on the quality of pulsed laser deposited Zn1−xMgxO thin films

The annealing effects of sapphire substrate before deposition on the quality of epitaxial Zn_1−xMg_xO thin films grown by pulsed laser deposition are reported. Our Experimental results indicate that the surface quality of Zn_1−xMg_xO thin films and hexagonal columnar growth is improved on the annealed sapphire substrate at high temperatures due to formation of atomic terraces on the substrate surface. The photoluminescence signals also increases with the increasing annealing temperature of the substrate.