Use of cathode lens in scanning electron microscope for low voltage applications |
| |
Authors: | Müllerová Ilona Frank Luděk |
| |
Institution: | (1) Institute of Scientific Instruments, Academy of Sciences of Czech Republic, Královopolská 147, 612 64 Brno, Czech Republic |
| |
Abstract: | At a landing energy of 10 eV it is possible to achieve spatial resolution of the same order as at the nominal energy, which is usually 15 keV in the classical scanning electron microscope, by taking advantages of the optical properties of the cathode lens. Two different types of the detection system were designed and tested to learn as much about the optical properties of this system as possible and to start to understand the contrast mechanisms at very low energies. Great changes in the contrast take place when the landing energy is changed from 10 eV to an energy of about 2 keV. |
| |
Keywords: | low voltage scanning microscopy cathode lens |
本文献已被 SpringerLink 等数据库收录! |