| A Shadow Moire Technique by Optional Multiple Light Sources for BGA Coplanarity Measurement |
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| 作者姓名： | SONG Yuanhe LI Genqian ZHAO Hong DONG Daqun JAN Yushan |
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| 作者单位： | Northwest Polytechnic University，Xi'an Jiaotong University，Xi'an 710049，China |
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| 摘 要： | １ＩｎｔｒｏｄｕｃｔｉｏｎＳｈａｄｏｗｍｏｉｒｅｉｎｔｅｒｆｅｒｏｍｅｔｒｙｉｓａｗｈｏｌｅｆｉｅｌｄｎｏｎｃｏｎｔａｃｔ３Ｄｍｅａｓｕｒｅｍｅｎｔｔｅｃｈｎｉｑｕｅ．ＩｔｉｓｆｉｒｓｔａｐｐｌｉｅｄｂｙＨ．Ｔａｋａｓａｋｉ［１］ｉｎ１９７０．Ｉｎ...
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| 收稿时间： | 1998/9/15 |
A Shadow Moire Technique by Optional Multiple Light Sources for BGA Coplanarity
Measurement |
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| SONG Yuanhe,LI Genqian,ZHAO Hong,DONG Daqun,JAN Yushan.A Shadow Moire Technique by Optional Multiple Light Sources for BGA Coplanarity Measurement[J].中国激光(英文版),1999,8(2):121-124. |
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| Authors: | SONG Yuanhe LI Genqian ZHAO Hong DONG Daqun JAN Yushan |
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| Abstract: | Shadow moire profilometry is a whole field non contact 3 D measurement method. Generally
there exist mechanical motion so that the measurement speed, life time and reliability are
limited. A fast measurement method without mechanical motion is realized in this work by using
the technique of changeable light source.This method satisfies the need for the on line
measurement of BGA coplanarity. |
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| Keywords: | shadow moire profilometry changeable light source BGA coplanarity |
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