ZrO2-based thin films synthesized by electrostatic spray deposition: Effect of post-deposition thermal treatments |
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| Institution: | 1. Department of Materials Engineering and Center for Thin Film Technologies and Applications, Ming Chi University of Technology, Taipei 243, Taiwan;2. Department of Electronic Engineering, Chang Gung University, Taoyuan 333, Taiwan;3. Institute of Materials Science and Engineering, National Taiwan University, Taipei 106, Taiwan;4. Electronics and Opto-electronics Research Laboratories, Industrial Technology Research Institute, Hsinchu 310, Taiwan |
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| Abstract: | Cubic and tetragonal Y2O3-doped ZrO2 thin films were deposited with a dense surface morphology by electrostatic spray deposition. Four dependent process parameters – substrate temperature, precursor solution flow rate, nozzle to substrate distance and the deposition time – have been used to control the process. Temperature dependent Raman spectroscopy and X-ray diffraction were performed in order to investigate the crystallization behavior and structural properties. |
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