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基于红外波段光谱吸收的小型化湿度探测系统
引用本文:鞠昱,谢亮,韩威,孙可.基于红外波段光谱吸收的小型化湿度探测系统[J].强激光与粒子束,2011,23(2).
作者姓名:鞠昱  谢亮  韩威  孙可
作者单位:中国科学院 半导体研究所, 北京 100083
基金项目:公益性行业(气象)科研专项经费项目,国家自然科学基金项目
摘    要: 探测系统的光源选择为垂直腔面发射激光器,选定水汽在1.854 μm的吸收峰。系统自动在直接测量法与谐波测量法之间切换,能够适应高低湿度环境。在低湿度环境检测中,利用二次谐波与一次谐波的比值来定标湿度,有效去除了光源不稳定对测量带来的影响;过采样的A/D转换结合数字锁相放大(DLIA)技术,提高了检测精度。系统通过以太网接口,可以实现远程数据采集。

关 键 词:传感器  湿度检测  红外波段光谱吸收  小型化  过采样  数字锁相放大
收稿时间:1900-01-01;

Undersized humidity detecting system based on infrared spectrum absorption
Ju Yu,Xie Liang,Han Wei,Sun Ke.Undersized humidity detecting system based on infrared spectrum absorption[J].High Power Laser and Particle Beams,2011,23(2).
Authors:Ju Yu  Xie Liang  Han Wei  Sun Ke
Institution:Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Abstract:An undersized humidity detecting system based on infrared spectrum absorption is introduced. A vertical-cavity surface-emitting laser is used as the light source and provides lasers at 1.854 μm which is a main absorption peak of water vapor. To cover all humidity condition, vapor density is detected via two different methods, which are switched by the system automatically depending on measure results. In low-density condition, the ratio of the second-harmonic to fundamental signal is used to eliminate the interference due to light power variation. A/D conversion with over-sampling and digital lock in amplification enhance the accuracy of signal processing, and with IEEE 802.11x protocol, automatic remote data acquisition is achieved.
Keywords:sensor  humidity detection  infrared spectrum absorption  undersized  over-sampling  digital lock in amplification  
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