| 用脉冲多弧离子放电技术镀制类金刚石薄膜及其化学结构和物理特性 |
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| 引用本文： | 朱昌,严一心,等.用脉冲多弧离子放电技术镀制类金刚石薄膜及其化学结构和物理特性[J].应用光学,1998,19(3):25-27. |
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| 作者姓名： | 朱昌 严一心 |
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| 作者单位： | 西安工业学院仪器系 |
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| 摘 要： | 利用脉冲多弧离子镀膜技术，以石墨为阴极镀制的无定形碳膜，其化学结构可用Raman光谱仪进行。薄膜的硬度和电阻率物理特性，可用常规方法测量。
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| 关 键 词： | Raman光谱 硬度 电阻率 类金刚石薄膜 脉冲多弧离子镀膜技术 |
STUDIES ON CHEMICAL STRUCTURE AND PHYSICAL PROPERTIES OF DIAMOND LIKE AMORPHOUS CARBON FILMS PREPARED BY PULSE ARC PLASMA DISCHNIQUE |
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| Zhu Chang,Yan Yixin,Hang Lingxia.STUDIES ON CHEMICAL STRUCTURE AND PHYSICAL PROPERTIES OF DIAMOND LIKE AMORPHOUS CARBON FILMS PREPARED BY PULSE ARC PLASMA DISCHNIQUE[J].Journal of Applied Optics,1998,19(3):25-27. |
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| Authors: | Zhu Chang Yan Yixin Hang Lingxia |
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| Abstract: | Thin films of amorphous carbon were prepared using pulse arc-plasma of a graphite target.The chemical structures of the films were characterized using Raman spectroscopy.The hardness and electrical resistivity were determined,and their relation to the film's chemical structure are discussed. |
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| Keywords: | pulse arc-plasma diamond like amorphous carbon film Raman Spectroscopy |
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