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Positive and negative photopatterning of metal oxides on silicon via bipolar electrochemical deposition |
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| Authors: | Choi H C Buriak J M |
| Affiliation: | Department of Chemistry, 1393 Brown Laboratories, Purdue University, West Lafayette, IN 47907-1393, USA. |
| Abstract: | Negative and positive microscale patterning of metal oxides is efficiently and rapidly carried out on flat Si(100) surfaces via a simple white light assisted bipolar electrochemical process. |
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