| 小周期金属多层膜厚度评价 |
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| 引用本文： | 冯洁,路庆华.小周期金属多层膜厚度评价[J].分析测试学报,2006,25(1):1-5. |
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| 作者姓名： | 冯洁 路庆华 |
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| 作者单位： | 上海交通大学,微纳科学技术研究院,薄膜与微细技术教育部重点实验室,上海,200030;上海交通大学,分析测试中心,上海,200030 |
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| 摘 要： | 超晶格多层膜是随着现代科技的进步而发展起来的新一代电子薄膜材料,半导体超晶格和量子阱多层膜材料在光电子领域已经占据了不可取代的地位。1988年,法国科学家在由Fe、Cr交替沉积而形成的Fe/Cr]金属多层膜中发现了超过50%的磁电阻变化率,这种现象被称为巨磁阻效应(GMR)1]。
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| 关 键 词： | 多层膜 厚度测量 XRD |
| 文章编号： | 1004-4957（2006）01-0001-05 |
| 收稿时间： | 2004-11-04 |
| 修稿时间： | 2005-10-09 |
Thickness Evaluation for Short Period Metallic Multilayers |
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| FENG Jie,LU Qing-hua.Thickness Evaluation for Short Period Metallic Multilayers[J].Journal of Instrumental Analysis,2006,25(1):1-5. |
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| Authors: | FENG Jie LU Qing-hua |
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| Institution: | 1. Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Institute of Micro and Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China; 2. Instrumental Analysis Center, Shanghai Jiaotong University, Shanghai 200030, China |
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| Abstract: | Three kinds of short period metallic multilayers were evaluated by small angle X-ray diffraction(XRD) method.The single period thickness and the total thickness of multilayers were calculated with various methods.The total thickness was further evaluated by using Dektak 6M surface profilers and atomic force microscope.The results obtained by those methods indicated that it is possible to evaluate the thickness of the short period multilayers through using the small peaks of second order diffraction which were after the first Bragg diffraction principal peak. |
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| Keywords: | XRD |
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