Software package for quantitative analysis of solid materials by energy-dispersive x-ray fluorescence spectrometry without absolute calibration

A software package for quantifying elements in solids from energy-dispersive x-ray fluorescence data is described. The algorithm is based on the fundamental parameter approach and facilitates the simultaneous determination of several elements at widely varying concentrations. The software comprises three programs. One program, for spectrometer control and data acquisition, resides in a dedicated microcomputer. The two other programs, for spectra deconvulution and data evaluation, reside in a larger central computer. On-line communication between the computers is feasible, and the system facilitates the implementation of new improved programs. The performance of the system was tested on standard reference materials, and satisfactory accuracy was obtained for up to 21 elements.