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折轴三反射光学系统的计算机辅助装调技术研究
引用本文:李旭阳,李英才,马臻,易红伟.折轴三反射光学系统的计算机辅助装调技术研究[J].应用光学,2009,30(6):901-906.
作者姓名:李旭阳  李英才  马臻  易红伟
作者单位:1.中国科学院西安光学精密机械研究所,陕西西安710068;2.中国科学院研究生院,北京100039
摘    要: 给出计算机辅助装调中失调量与像差关系的数学模型,利用Zemax对折轴三反射光学系统进行失调仿真,得到失调数据,再对数据进行分析和处理,求得次镜和三镜的灵敏度矩阵,还对各种初级像差与各装调参量之间的对应关系及该系统的失调特性进行讨论。根据以上分析结果,最终确定了共轴三反射光学系统的装调方案。为了验证方案的可行性,在Zemax中对共轴三反射光学系统人为地加入不同的失调量后,按照确定的装调方案,利用建立的计算机辅助装调数学模型计算出失调量的大小和方向,再根据计算结果对共轴三反射光学系统进行调整,仿真结果和实际装调结果都证明该方案是可行的。

关 键 词:三反射系统  计算机辅助装调  失调量
收稿时间:2009/2/10

Computer-aided alignment method of coaxial three-mirror-anastigmat system
LI Xu-yang,LI Ying-cai,MA Zhen,YI Hong-wei.Computer-aided alignment method of coaxial three-mirror-anastigmat system[J].Journal of Applied Optics,2009,30(6):901-906.
Authors:LI Xu-yang  LI Ying-cai  MA Zhen  YI Hong-wei
Institution:1. Xi’an Institute of Optics and Precision Machanicas, CAS, Xi’an 710068, China;
2. Graduate School of CAS, Beijing 100039, China
Abstract:The mathematic model of the relationship between the misalignment and aberration in the process of computer-aided alignment is presented. The misalignment state of three-mirror-anastigmat system was simulated with Zemax, and the alignment data was obtained. The corresponding relationship between the misalignment error and elementary aberration is analyzed, and the misalignment characteristic of three-mirror-anastigmat system is summarized. The alignment scheme is determined by the above analysis. In order to verify the alignment scheme, the three-mirror-anastigmat system was aligned according to the value which was calculated in accordance with the alignment scheme. The result demonstrates that the alignment scheme is feasible and guidable to the alignment of three-mirror-anastigmat systems.
Keywords:three-mirror-anastigmat system  computer-aided alignment  misalignment
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