Impact of electron-electron interaction on the electron energy distribution function in molecular plasmas under rf field action |
| |
Authors: | R Winkler J Wilhelm M Capitelli C Gorse |
| |
Institution: | (1) Zentralinstitut für Elektronenphysik, Bereich Gasentladungsphysik, Greifswald, Germany;(2) Dipartimento di Chimica, Università di Bari and Centro di Studio per la Chimica dei Plasmi del CNR, Traversa Re David 200 n.A, 1-70126 Bari, Italy |
| |
Abstract: | Calculations of the electron energy distribution and of relevant macroscopic quantities of collision-dominated, weakly ionized plasmas under rf field action have been performed with increasing degrees of ionization, and the impact of the electron-electron interaction on these quantities was determined. The investigations were performed for the gas plasmas in CO and H2 as representatives of molecular plasmas The energy distribution and macroscopic quantities are obtained by solving the nonstationary Bolizmann equation for a given rf field and degree of ionization taking into accoung and additional Fokker-Planck term besides the collision integrals for the elastic and the main inelastic collision processes. In these molecular plasmas a remarkable impact of the electron-electron interaction connected with increasing Maxwellization is observed for degrees of ionization greater than 10. |
| |
Keywords: | Electron-electron interaction in rf plasmas CO H2 Boltzmann equation electron energy distribution |
本文献已被 SpringerLink 等数据库收录! |