| MPIIID制备TiAlN涂层的高温抗氧化及摩擦性能 |
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| 引用本文： | 解志文,王浪平,王小峰,闫久春,黄磊,陆洋. MPIIID制备TiAlN涂层的高温抗氧化及摩擦性能[J]. 摩擦学学报, 2011, 31(2): 175-180 |
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| 作者姓名： | 解志文 王浪平 王小峰 闫久春 黄磊 陆洋 |
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| 作者单位： | 哈尔滨工业大学现代焊接生产技术国家重点实验室,黑龙江哈尔滨,150001 |
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| 基金项目： | 国家自然科学基金项目（10875033） |
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| 摘 要： | 采用多源等离子体注入与沉积（MPIIID）装置制备了不同Al含量的TiAlN涂层，利用X射线能谱仪(EDX)、扫描电镜(SEM)、X射线衍射(XRD)、X射线光电子能谱(XPS)、纳米探针和摩擦试验对涂层的组成以及高温抗氧化和摩擦性能进行分析。结果表明：Al元素的加入明显提高了涂层的高温抗氧化能力，生成的Al2O3能有效地抑制氧的扩散；当Al的质量百分数为6.18%时，涂层硬度最高，约为38GPa，涂层具有良好的摩擦磨损特性。
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| 关 键 词： | 多源等离子体注入与沉积；TiAlN涂层；氧化；摩擦 |
| 修稿时间： | 2010-07-09 |
High Temperature Oxidization Resistance and Wear Properties of TiAlN Coatings Deposited by MPIIID |
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| XIE Zhi-wen,WANG Lang-ping,WANG Xiao-feng,YAN Jiu-chun,HUANG Lei and LU Yang. High Temperature Oxidization Resistance and Wear Properties of TiAlN Coatings Deposited by MPIIID[J]. Tribology, 2011, 31(2): 175-180 |
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| Authors: | XIE Zhi-wen WANG Lang-ping WANG Xiao-feng YAN Jiu-chun HUANG Lei LU Yang |
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| Affiliation: | State Key Laboratory of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001, China;State Key Laboratory of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001, China;State Key Laboratory of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001, China;State Key Laboratory of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001, China;State Key Laboratory of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001, China;State Key Laboratory of Advanced Welding Production Technology, Harbin Institute of Technology, Harbin 150001, China |
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| Abstract: | TiAlN coatings with different Al contents were prepared by multi-plasma immersion ion implantation and deposition (MPIIID).The high temperature oxidization resistance and wear properties of these coatings were investigated by energy dispersive X-ray (EDX), scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), nano-indentation, friction tests. Results revealed that TiAlN coating possessed better oxidation resistance because a protective Al2O3 layer can effectively inhibit the diffusion of oxygen into the coating. When the concerntration of Al reached 6.18 %, the coating had the highest hardness of 38 GPa and excellent wear resistance. |
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| Keywords: | multi-plasma immersion ion implantation and deposition TiAlN coating oxidation friction |
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