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Corpuscular diagnostics of a hollow-cathode discharge-III. The metal-ions-regime evolution
Authors:J. Rybníček
Affiliation:(1) Institute of Plasma Physics, Czechosl. Acad. Sci, Prague, Pod vodárenskou v"Ecaron""Zcaron"í 4, 180 69 Praha 8, Czechoslovakia
Abstract:The variations in time of mass spectra of ions, extracted from the hollow-cathode discharge in the regime of the intensive sputtering of the cathode material were measured. The mass spectrum changes in time conspicuously. From the results of measurements a distinct anisotropy of ion beam is inferred. The discharge turns into a ldquometal-ions regimerdquo.The helpful discussions with Dr. J. Musil are gratefully acknowledged.
Keywords:
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