| 两类无油超高真空系统的实验方法 |
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| 引用本文： | 任多敏,谢宁. 两类无油超高真空系统的实验方法[J]. 物理实验, 2001, 21(12): 13-15 |
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| 作者姓名： | 任多敏 谢宁 |
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| 作者单位： | 中国科学技术大学天文与应用物理系,合肥,230026 |
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| 摘 要： | 对涡轮分子泵无油超高真空系统及溅射离子泵无油超高真空系统的结构及操作方法作了介绍,并对它们相关的特性进行了讨论。
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| 关 键 词： | 涡轮分子泵 溅射离子泵 无油超高真空系统 结构 实验方法 |
| 修稿时间： | 2001-07-11 |
Experimental methods for two kinds of non-oil ultra high vacuum system |
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| REN Duo-min XIE Ning. Experimental methods for two kinds of non-oil ultra high vacuum system[J]. Physics Experimentation, 2001, 21(12): 13-15 |
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| Authors: | REN Duo-min XIE Ning |
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| Abstract: | Abstract: The structures and operating methods of turbo molecular pump with non-oil ultra high vacuum system and sputter ion pump with non-oil ultra high vacuum system are introduced, and their relevant characters are discussed. |
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| Keywords: | turb molecular pump sputter ion pump non-oil ultra high vacuum system |
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