Alternative method of wavelength drift free dual-wavelength heterodyne interferometry for the absolute distance measurement |
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Authors: | Kun-Huang Chen Jing-Heng Chen Chi-Chang Wu Wei-Yao Chang |
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Affiliation: | (1) Department of Electrical Engineering, Feng Chia University, 100 Wenhwa Road, Seatwen, Taichung, 40724, Taiwan, R.O.C.;(2) Department of Photonics, Feng Chia University, 100 Wenhwa Road, Seatwen, Taichung, 40724, Taiwan, R.O.C. |
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Abstract: | Based on the technique of dual-wavelength and principle of heterodyne interferometry, a modified method for measuring the absolute distance is proposed. Because two test lights suffer from the same influence of wavelength drift in the measurement setup, the minus effect coming from the wavelength drift can be offset. Therefore, the measurement accuracy can be significantly increased. The feasibility of this method was demonstrated with a measurement resolution of about 1.50 μm. This method provides the advantages of a simple optical setup, easy operation and rapid measurement. |
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Keywords: | heterodyne interferometry absolute distance dual-wavelength phase difference |
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