Fabrication of Compound Lattice by Holographic Lithography |
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作者姓名: | 钟永春 朱少安 汪河洲 |
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作者单位: | StateKeyLaboratoryofOptoelectronicMaterialsandTechnologies,SunYat-SenUniversity,Guangzhou510275 |
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摘 要: | Some compound lattices in photonic crystals with large complete photonic band gaps, such as the diamond structure and the two-dimensional hexagonal compound structure, is desired for fabrication. A novel method for fabrication of compound lattices by holographic lithography is reported. The key point is phase modulation by photoelectrical control and multiple-exposure techniques. This technique introduces many advances: for instance,using the same coherent beams and without changing the position of the sample during multiple-exposure.
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关 键 词: | 全息平版印刷 复点阵 光子晶体 微观结构 光电控制 |
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