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Signal processing method of phase correction for laser heterodyne interferometry |
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| Affiliation: | 1. College of Mathematics, Jilin University, Changchun, Jilin Province 130012, China;2. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130033, China;1. Aresys, Via Privata Flumendosa 16, 20132 Milano, Italy;2. ESA ESTEC, Keplerlaan 1, 2201 AZ Noordwijk, The Netherlands;3. ESA ESRIN, Via Galileo Galilei, 00044 Frascati, Italy;1. National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China;2. Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100049, China;1. COMSATS Institute of Information Technology, Park road, Chak Shahzad, Islamabad, Pakistan;2. Department of Physics and Applied Mathematics, Pakistan Institute of Engineering and Applied Sciences, Islamabad 45650, Pakistan |
| Abstract: | A novel signal processing method of movement direction identification and phase correction is presented for laser heterodyne interferometry. Based on the reference signal, four intervals with phase difference of 90° each other are set up. The real-time movement direction identification and the integer fringe counting are realized by detecting the times that the rising-edge of the measurement signal crosses the intervals. The phase correction approach is proposed in detail to solve the fraction phase compensation when the initial phase difference is not equal to the zero phase difference. Three experiments of the stability test, the nanometer and micrometer displacement tests on bi-directional movement were performed to demonstrate the usefulness and feasibility of the presented signal processing method. |
| Keywords: | Heterodyne interferometry Phase measurement Movement direction identification Phase correction Displacement measurement |
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