Plasma production by helicon and slow waves |
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Authors: | Sakawa Youichi Kunimatsu Hiroyuki Kikuchi Hideki Fukui Yasuaki Shoji Tatsuo |
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Affiliation: | Department of Energy Engineering and Science, Nagoya University, Nagoya 464-8603, Japan. g44210a@nucc.cc.nagoya-u.ac.jp |
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Abstract: | The observation of slow-wave sustained (SW) discharge in a whistler- or helicon-wave range of frequency is made using high-frequency and very-high-frequency bands of rf. The SW discharge occurs at an extremely low rf power and plasma density, which are lower than a capacitive-coupling discharge region. |
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