带缓冲层的导模共振滤光片反射光谱特性

将均质多层膜系设计中的缓冲层概念引入到反射导模共振滤光片的设计中,以研究缓冲层的增加对导模共振滤光片反射光谱特性的影响.设计并通过严格的耦合波理论计算了一、二、三、四通道导模共振反射滤光片光谱特性.在膜系设计中增加缓冲层后.随着其厚度的逐渐增加.反射光谱中依次出现二、三、四个窄带反射峰;缓冲层厚度为796.35 nm时.当滤光片光栅层占空比在0.2～O.9范围内、光栅深度在100～200 nm变化时,共振峰的位置、反射率峰值高度几乎不变,保持了很好的多通道滤光片特性.

Reflection Spectra Properties of Guided-Mode Resonance Filters with Buffer Layer

Guided-mode resonance reflection filters are presented by adding a buffer layer in designing homogeneous thin-film reflection filters for studying the influence of buffer layer on reflection spectra of the guided-mode resonance filters. With the thickness increase of buffer layer, the reflection spectra of guided-mode resonance filters with one, two, three and four channels are calculated with the rigorous coupled-wave theory, two, three and four narrowband reflection peaks are found. When the buffer layer is chosen as 796.35 nm, the filling factor from 0.2 to 0.9, and the depth of grating between 100 nm and 200 nm, the resonant wavelength location and reflection ratio are nearly invariable, showing good characteristic of the filters.