Infrared absorption spectrum of beryllium acceptors in silicon |
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Authors: | L. T. Ho F. Y. Lin W. J. Lin |
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Affiliation: | (1) Institute of Physics, Academia Sinica, Taipei, Taiwan Republic of China |
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Abstract: | Beryllium, when introduced into silicon by thermal diffusion, gives rise to several acceptor impurity centers. The infrared absorption spectrum of beryllium in silicon has been measured with a Fourier-transform spectrometer. The absorption spectrum observed clearly shows five different beryllium acceptor centers in silicon. |
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