Analysis of laser micro drilled holes through aluminium for micro-manufacturing applications

Conventional laser machining of aluminium with long wavelength lasers has its inherent problems due to the high reflectivity of aluminium to laser radiation (Handbook of Optics, vol 1, 2nd ed. New York: McGraw-Hill; 1995). Laser processing at shorter wavelengths reduces the reflectivity of the workpiece to the incident laser radiation and can also reduce the dimensions of the obtainable machining geometries. This paper reviews the limiting factors in the micro machining of aluminium using a diode pumped solid state (DPSS) Nd:YAG laser operated at 1064, 532, and 355 nm. The geometries of the laser-machined samples were investigated using interferometric, and optical methods to assess how the processing fluence and wavelength will affect the obtainable precision for successful integration of the laser in a micromachining CAD/CAM system.