| La_(1-x)Sr_xMnO_3电极的制备及其对Ba_(1-x)Sr_xTiO_3薄膜介电性能的影响 |
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| 引用本文： | 辛立强,付兴华,于玲君,崔永涛.La_(1-x)Sr_xMnO_3电极的制备及其对Ba_(1-x)Sr_xTiO_3薄膜介电性能的影响[J].人工晶体学报,2010,39(1):262-266. |
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| 作者姓名： | 辛立强 付兴华 于玲君 崔永涛 |
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| 作者单位： | 济南大学材料学院,济南,250022 |
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| 基金项目： | 济南大学博士基金资助项目 |
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| 摘 要： | 采用溶胶-凝胶法在Si(100)基底上制备了La_(1-x)Sr_xMnO_3电极材料.采用XRD、SEM对材料的晶体结构、表面形貌、薄膜厚度进行了表征,研究了退火温度对薄膜结构及电阻率的影响,以及介电常数与介电损耗随频率变化的关系.结果表明:在x=0.5,退火温度为800 ℃时,La_(0.5)Sr_(0.5)MnO_3薄膜的电阻率为1.2×10~(-2) Ω·cm.La_(0.5)Sr_(0.5)MnO_3薄膜与Ba_(1-x)Sr_xTiO_3匹配性较好,实现了BST薄膜的外延生长,其介电性能比在Pt上制备的Ba_(1-x)Sr_xTiO_3得到了明显的改善.
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| 关 键 词： | 溶胶-凝胶技术 La_(1-x)Sr_xMnO_3电极 Ba_(1-x)Sr_xTiO_3 外延生长 介电性能 |
Preparation of La_(1-x)Sr_xMnO_3 Electrode Material and Influence on Dielectric Performance of Ba_(1-x)Sr_xTiO_3 Thin Film |
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| XIN Li-qiang,FU Xing-hua,YU Ling-jun,CUI Yong-tao.Preparation of La_(1-x)Sr_xMnO_3 Electrode Material and Influence on Dielectric Performance of Ba_(1-x)Sr_xTiO_3 Thin Film[J].Journal of Synthetic Crystals,2010,39(1):262-266. |
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| Authors: | XIN Li-qiang FU Xing-hua YU Ling-jun CUI Yong-tao |
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| Institution: | School of Materials Science and Engineering;University of Jinan;Jinan 250022;China |
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| Abstract: | |
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| Keywords: | Sol-gel technology La1-xSrxMnO3 electrode Ba1-xSrxTiO3 epitaxial growth dielectric property |
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