Crystal structure of the growth surface of silicon carbide obtained by sublimation |
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Authors: | G. I. Babayants V. A. Popenko |
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Affiliation: | (1) Research Institute NPO Luch, Zheleznodorozhnaya.ul. 24, Podolsk, Moscow oblast, 142100, Russia |
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Abstract: | Structural study of polycrystalline silicon carbide obtained by sublimation performed via X-ray luminescence and X-ray diffraction analysis. It is shown that chemical vapor deposition of silicon carbide results in the formation of grains with the (00.1), (01.1), and (12.3) crystallographic planes parallel to the growth surface. The grains with the (00.1) growth planes are characterized by perfect structure and by red luminescence. Domains with yellow luminescence have a mosaic structure with the (01.1) and (12.3) growth planes. |
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