Pattern structures fabricated on ZnS–SiO2/AgO
x
/ZnS–SiO2 thin film structure by laser direct writing technology |
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Authors: | Aihuan Dun Jingsong Wei Fuxi Gan |
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Institution: | (1) W.M. Keck Biomedical Materials Research Lab, School of Mechanical and Materials Engineering, Washington State University, Pullman, WA 99164-2920, USA;; |
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Abstract: | In this work, we used the multilayered ZnS–SiO2/AgO
x
/ZnS–SiO2 films as the laser direct writing materials, and pattern structures with different shapes and sizes were directly written
with green laser (λ=488 nm). Compared with traditional photoresist materials, the pattern structures can be directly formed in this film structures
without developing and etching procedures and also can be directly written by very low laser power. By tuning the laser parameters
precisely, pattern structures with different sizes and shapes could be obtained as well. The analysis indicates that the formation
mechanism of the pattern structure is mainly due to the volume expansion caused by AgO
x
decomposition into silver particles and oxygen. The oxygen applies pressure to the ZnS–SiO2 layer and makes a hollow shell under the film. The aspect ratios of the patterns rapidly increase from the minimum of 0.012
in laser power of 3.0 mW to the maximum of 0.201 in laser power of 5.0 mW. The thermal stability of the patterns was also
qualitatively studied. |
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Keywords: | |
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