Emission characteristics of high-powered microwave induced plasma optical emission spectrometry by using nitrogen–oxygen mixture gas

A high-powered, microwave-induced nitrogen–oxygen plasma (N₂–O₂–MIP) generated by using an Okamoto cavity at atmospheric pressure was investigated when the observation height, the flow rate of carrier gas, and the oxygen content were varied as the experimental parameters. The emission characteristics of the plasma were evaluated with regard to the excitation temperature and the intensity ratio of atomic line to ionic line. The excitation temperature of the N₂–O₂–MIP was in the range of 5100–5700 K when the oxygen content was varied from 0 to 30% at the observation height of 7 mm and the carrier gas flow rate of 0.6 l/min. The intensity ratio of atomic line to ionic line was elevated with an increase in the oxygen content.