斜磁场作用下的射频等离子体平板鞘层结构

建立一个一维坐标空间、三维速度空间的斜磁场作用下的射频等离子体平板鞘层模型，讨论了磁场对射频鞘层结构及其参数特性的影响.研究结果表明：磁场对鞘层结构有不可忽略的影响，特别是能够使鞘层边界附近的离子速度分布和密度分布产生明显的变化.此外，虽然磁场不能改变离子总的能量密度分布，却能改变离子的运动状态，并同时影响着基板上离子在各个方向上的能量分布和入射偏移角度.关键词：射频鞘层磁场

Structure of radio-frequency flat plasma sheath in an oblique magnetic field

A radio frequency flat plasma sheath model in an oblique magnetic field is built, which has one-dimensional coordinate space and three-dimensional speed space. The effect of magnetic field on the structure of radio frequency sheath and characteristic parameters are discussed. The numerical simulation results show that the effect of magnetic field on the sheath structure cannot be ignored. In particular, it brings about obvious changes in the ion density distribution and velocity distribution. Furthermore, the magnetic field cannot change the total energy density distribution of ions, but the Lorentz force does influence its movement state, and at the same time affects the ion energy distribution in every directions, as well as the incidence departure angle of ions.