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Anodic behavior of nickel-based alloys in the electrolytic production of NF3
Authors:Atsuhisa Mimoto  Sojiro Kon  Takuya Motomura  Minoru Inaba
Institution:a Department of Applied Chemistry, Graduate School of Engineering, Doshisha University, 1-3 Miyako-dani, Tadara, Kyotanabe, Kyoto 610-0321, Japan
b Semiconductor Material Department, Electronics & Information Material Division, Mitsui Chemicals, Incorporation, Shiodome City Center, 1-5-2 Shinbashi, Minato-ku, Tokyo 105-7117, Japan
c Department of Molecular Science and Technology, Faculty of Engineering, Doshisha University, 1-3 Miyako-dani, Tadara, Kyotanabe, Kyoto 610-0321, Japan
Abstract:The Ni-based alloys, such as Ni-Co, Ni-Mn, Ni-Ag, Ni-Cu, Ni-Al and Ni-Si, prepared by hot isostatic pressing (HIP) at 1000 °C under 2 × 108 Pa for 2 h were employed as the anodes for electrolytic production of NF3. The current efficiencies for NF3 formation were 42-38, 52-40, 52-47, 63-62, 50 and 41% for Ni-Co, Ni-Mn, Ni-Ag, Ni-Cu, Ni-Al and Ni-Si alloys, respectively. The current efficiencies only on Ni-Cu alloys with Cu concentrations lower than 10 mol% were almost the same as those on Ni sheet and HIPed Ni anodes, whereas those on the other alloys used in this study were smaller compared with those on both Ni anodes. On the other hand, the current losses caused by anodic dissolution of Ni-Co, Ni-Mn, Ni-Ag, Ni-Cu, Ni-Al and Ni-Si alloy electrodes were 7.95-4.42, 6.40-7.02, 5.60-6.30, 3.34-6.33, 5.10 and 0.18%, respectively. The anode consumptions of Ni-5 mol% Cu and Ni-5 mol% Si alloys were almost the same or smaller compared with those of Ni sheet and HIPed Ni electrodes, though those of other alloys used were large compared with those of both Ni anodes. Consequently, addition of Cu to the nickel matrix is available for a cheaper cost of anode with keeping a same current efficiency as that on the Ni anode and addition of Si to the nickel matrix is effective for decreasing anode consumption largely. A Ni sheet electrode containing a trace of impurities, such as Co, Mn, Ag and Al, is also favorable as the anode for electrolytic production of NF3.
Keywords:Nickel-based alloy anode  Hot isostactic pressing (HIP)  Nitrogen trifluoride  Current efficiency for formation of nitrogen trifluoride  Anode consumption
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