| 非晶硅太阳能电池生产工艺用氣分析方法研究 |
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| 引用本文： | 崔熙鐘,唐福君,蒋文全,林佳,王婉英.非晶硅太阳能电池生产工艺用氣分析方法研究[J].分析试验室,1993(3). |
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| 作者姓名： | 崔熙鐘 唐福君 蒋文全 林佳 王婉英 |
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| 作者单位： | 北京有色金属研究总院，北京有色金属研究总院，北京有色金属研究总院，北京有色金属研究总院，北京有色金属研究总院 北京 100088，北京 100088，北京 100088，北京 100088，北京 100088 |
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| 摘 要： | 本文对非晶硅太阳能电池制造工艺过程所用的无机氢化物烷类气体硅烷、硼烷、磷烷、甲烷和氢及其混合气的配制与分析方法进行了研究,以微机控制配气、检测程序、气相色谱法分成分析杂质,电容法测水分,方法已应用于工艺过程分析。
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| 关 键 词： | 非晶硅太阳能电池 氢化物 质量流量 多维气相色谱 |
Analysis of Gases used in the Manufacture of Amorphous Silicon Solar Cells |
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| Cui,Xizhong,Tang Fujun,Jiang Wenquan,Lin Jia and Wang Wanying.Analysis of Gases used in the Manufacture of Amorphous Silicon Solar Cells[J].Chinese Journal of Analysis Laboratory,1993(3). |
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| Authors: | Cui Xizhong Tang Fujun Jiang Wenquan Lin Jia and Wang Wanying |
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| Abstract: | SiH_4,PH_4,B_2H_6,CH_4,H_2 and their mixture are used in the manufacture of amorphous silicon solar cells by chemical gas phase deposition method. The preparation and analytical methods of these gas mixtures have been studied in this paper. The gas supply system and the detection system were controlled by a micro-computer. The content of each substance above and the gaseous impurities were determined by gas chromatography. The moisture in the gases was measured with an electric capacity detector. All these methods have been applied in production process. |
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| Keywords: | Amorphous silicon solar cell gas chromatography multi-dimensional gas chromatography gas analysis |
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