| 类金刚石薄膜红外光学常数的计算机拟合 |
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| 引用本文： | 宋强 邢中菁. 类金刚石薄膜红外光学常数的计算机拟合[J]. 光学学报, 1995, 15(8): 140-1143 |
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| 作者姓名： | 宋强 邢中菁 |
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| 作者单位： | 复旦大学物理系三束材料改性国家重点实验室 |
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| 摘 要： | 报道了一种对类金刚石薄膜红外透射率曲线最小二乘法拟合的方法，确定类金刚石薄膜的红外光学常数－折射率、吸收系数以及薄膜厚度及表面粗糙度。介绍了相应的数学模型，并给出了对类金刚石薄膜样品的实验测及拟合结果。
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| 关 键 词： | 类金刚石薄膜 红外光学常数 曲线拟合 薄膜 |
| 收稿时间： | 1994-07-13 |
Curve Fitting to Determine IR Optical Constants of Diamond-Like Films |
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| Song Qiang, Xing Zongjin, Shen Yuanhua, Ying Xuantong. Curve Fitting to Determine IR Optical Constants of Diamond-Like Films[J]. Acta Optica Sinica, 1995, 15(8): 140-1143 |
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| Authors: | Song Qiang Xing Zongjin Shen Yuanhua Ying Xuantong |
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| Abstract: | transmittance curve fitting method was used to determine the IR refractive index, absorption coeffecient, thickness and surface roughness of diamond-like films. A mathematical model to calculate the transmittance function of diamond-like films on silicon substrate is introduced. The experimental measurement and curve fitting results are given. |
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| Keywords: | diamond-like film IR optical constants curve fitting |
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